Leader Precision Instrument Co., Ltd
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Wafer Inspecting Microscope Inspect500
Usage
INSPECT series measuring metallurgical microscope are widely used in semiconductor packages, solder pads, loop height, FPD panels (LCM), wafer level CSPS and so on.
Features & Advantages of Wafer Inspecting microscope
■ High-precision marble base, table and column to ensure high stability and rigidity
■ Marble table design, with precision V-shaped cross rail, ensure long-term use without deform, effectively guarantee high mechanical precision
■ High-quality optical system and high-resolution CCD ensure sharp image edges
■ Three-ring and eight-zone LED ring surface cold light source and contour light source, avoid the deformation of precision parts caused by the heat from light
■ Optional Nikon tilting trinocular tube + quintuple nosepiece
■ Independent research and development of image measuring software, powerful and easy to operate
Technical data
| Model | INSPECT300 | INSPECT400 | INSPECT500 | ||||
| X,Y axis travel(mm) | 300*200 | 400*300 | 500*400 | ||||
| Stage glass size(mm) | 357*257 | 457*357 | 557*457 | ||||
| Z axis travel(mm) | 100 | ||||||
| X,Y,Z axis resolution (μm) | 1 | ||||||
| Length unit | Linear scale | ||||||
| Measuring accuracy (μm) | 2.5+L/150 L=measuring length (mm) | ||||||
| Operation mode(X, Y) | Manual | ||||||
| Operation mode(Z) | CNC | ||||||
| Image system | High resolution CCD camera | ||||||
| Quintuple nosepiece | 5X | 10X | 20X | 50X | |||
| Eyepiece | WF10X | ||||||
| Measuring software | 2D measuring software | ||||||
| Illumination | Transmitted | Epi-illumination system | |||||
| Contour | LED parallel contour light | ||||||
| Power supply | AC100~240V 50/60Hz | ||||||