INSPECT series measuring metallurgical microscope are widely used in semiconductor packages, solder pads, loop height, FPD panels (LCM), wafer level CSPS and so on.

Features

■ High-precision marble base, table and column to ensure high stability and rigidity

■ Marble table design, with precision V-shaped cross rail, ensure long-term use without deform, effectively guarantee high mechanical precision

■ High-quality optical system and high-resolution CCD ensure sharp image edges

■ Three-ring and eight-zone LED ring surface cold light source and contour light source, avoid the deformation of precision parts caused by the heat from light

■ Optional Nikon tilting trinocular tube + quintuple nosepiece

■ Independent research and development of image measuring software, powerful and easy to operate

Technical data

Model		INSPECT300		INSPECT400		INSPECT500
X,Y axis travel(mm)		300*200		400*300		500*400
Stage glass size(mm)		357*257		457*357		557*457
Z axis travel(mm)		100
X,Y,Z axis resolution (μm)		1
Length unit		Linear scale
Measuring accuracy (μm)		2.5+L/150, L=measuring length (mm)
Operation mode(X, Y)		Manual
Operation mode(Z)		CNC
Camera		High resolution CCD camera
Quintuple nosepiece		5X	10X		20X		50X
Eyepiece		WF10X
Measuring software		2D measuring software
Illumination	Transmitted	Epi-illumination system
	Contour	LED parallel contour light
Power supply		AC100~240V 50/60Hz

Features of Infinity plan achromatic bright field objective

PL L5X/0.12 (Work distance):26.1 mm
PL L10X/0.25 (Work distance):20.2 mm
PL L20X/0.40 (Work distance):8.80 mm
PL L50X/0.70 (Work distance):3.68 mm

6V/30W halogen and brightness enable control( Reflected light)

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